Smart Mass kwarara mita Small girman kwarara mai kula da zafi gas mass kwarara mita
Amfani da Features
Mass Flow Controller (MFC) ana amfani da shi don daidaitaccen ma'auni da sarrafa yawan kwararar gas. Suna da muhimmiyar rawa a cikin bincike da samarwa a cikin masana'antun semiconductor da haɗin kewaye, masana'antun kayan musamman, masana'antun sinadarai, kuma akwai fannoni daban-daban na masana'antu, magunguna, *** da injin fitilu. Ta yau da kullun aikace-aikace lokuta sun hada da: lantarki aiki kayan aiki, kamar yaduwa, fadada, CVD、 Oxidation, plasma engraving, sputtering, Ion allura; & rufi kayan aiki, fiber narkewa, micro-reaction na'urori, mix gas rarraba tsarin, capillary ma'auni, gas chromatography da sauran bincike kayan aiki.
Main fasaha nuna alama
Ma'auni kewayon (20,30,50,100,200,300,500) SCCM (0 ~ 1,2,3,5,10) SLM
Daidaito +1.5% FS
Linear + 0.5 ~ 1.5% FS
Maimaita daidaito + 0.2% FS
Amsa lokaci 10sec Gas halaye: (1 ~ 4) sec
Aiki matsin lamba bambanci 0.1 ~ 0.5MPa
Matsin lamba juriya 3Mpa 6Mpa 10Mpa
aiki yanayin zafin jiki 0 ~ 70 ℃
Adadin dijital RS485 MODBUS yarjejeniya
Analog yawan DC 0 ~ 5V, 4 ~ 20mA Zaɓi
Kasuwancin lantarki: SLM
Wutar lantarki DC + 15V / 24V zaɓi, kwararar mita <50mA, mai sarrafawa <200mA
Wutar lantarki haɗin DB15
Kwarara 1 × 10 SCCSHe
tushe kayan 316L bakin karfe
hatimi kayan fluorine roba, butane roba, neoprene
Gas hanyar haɗi Φ3, Φ6, Φ10, 1/8 ", 1/4 ", 3/8 "
Lura: Masu auna kwararar jiki da masu sarrafa kwararar jiki na masana'antu yawanci ana daidaitawa da nitrogen ((N₂).
Ƙungiyar ƙididdigar ƙididdiga ita ce: SCCM (daidaitaccen ml / min); SLM (daidaitaccen lita / min)
Smart Mass kwarara mita Small girman kwarara mai kula da zafi gas mass kwarara mita